Facilities

Fabrication systems Characterization systems Laser systems Numerical simulations

Super critical rinser & dryer	LB film deposition apparatus	Sample preparation room
Inductively coupled plasma – Reactive ion etching device	Nano-imprinter	Sputtering system
EB deposition system	Deposition system for organic materials	Compact etching system
EB lithography	Ion deposition	Maskless lithography
Compact sputtering

FTIR & polarized microspectroscopy system	Raman & fluorescence microscope	UV-VIS-NIR spectrophotometer
Atomic force microscope	Scanning electron microscope	Joint-type air spring vibration isolation system
Confocal laser scanning microscope	Confocal laser scanning microscope	Air spring vibration isolation system
Compact Scanning Electron Microscope

Optical parametric oscillator & femtosecond pulsed laser system	High energy regenerative amplifier & femtosecond pulsed laser system	Femtosecond pulsed laser & optical parametric amplifier
Wavelength sweep femtosecond pulsed laser	Femtosecond ultrashort pulsed laser	Femtosecond pulsed laser
Femtosecond pulsed fiber laser	High repetition rate femtosecond pulsed laser	Quantum cascade laser