← Facilities
Compact Etching System
Maker: SAMCO
Model: FA-1
Reactive ion etching system, which allows us to remove polymeric thin layers such as a resist and flatten/remove insulating films such as SiO2.
← Facilities
Maker: SAMCO
Model: FA-1
Reactive ion etching system, which allows us to remove polymeric thin layers such as a resist and flatten/remove insulating films such as SiO2.
2-1 Hirosawa, Wako, Saitama 351-0198, JAPAN
Email contact [at]mets.riken.jp